The paper details the development of four domain-expert-reviewed JSON Schemas for Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE) processes. These schemas are designed to address the issue of heterogenous reporting across experimental and simulation literature in materials science. The schemas structure materials, process conditions, configurations, and measured or predicted results. The schemas were curated using schema-miner and grounded in QUDT using schema-miner pro.
The schemas are compared based on their scope, structure, and semantic grounding. They are demonstrated for use in schema-guided literature extraction and publication of structured records through ORKG templates. The research focuses on enabling machine-actionable reuse of existing data.
This work provides a framework for organizing and comparing ALD and ALE processes. The use of JSON Schemas allows for automated extraction of key information from scientific publications, reducing the time and effort required for data analysis and synthesis. The schemas are intended to facilitate knowledge sharing and accelerate materials science research.
The schemas are intended to be used in conjunction with ORKG templates for structured record publication. The development utilized schema-miner and schema-miner pro.
Source: https://arxiv.org/abs/2609.12139
